@inproceedings{BalogJakobyMagerletal.2008,
  author    = {Peter Balog and Bernhard Jakoby and Gottfried Magerl and Erwin Schoitsch},
  title     = {Informationstagung Mikroelektronik 2008},
  booktitle = {Tagungsband, OVE Schriftenreihe Nr. 50, 2008},
  year      = {2008},
}